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Semiconductor Lithography
Wayne M. Moreau
€ 193.06
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Description for Semiconductor Lithography
Paperback. Series: Microdevices. Num Pages: 952 pages, biography. BIC Classification: TJFD5. Category: (P) Professional & Vocational. Dimension: 244 x 170 x 48. Weight in Grams: 1604.
Semiconductor lithography is one of the key steps in the manufacturing of integrated silicon-based circuits. In fabricating a semiconductor device such as a transistor, a series of hot processes consisting of vacuum film deposition, oxidations, and dopant implantation are all patterned into microscopic circuits by the wet processes of lithography. Lithography, as adopted by the semiconductor industry, is the process of drawing or printing the pattern of an integrated circuit in a resist material. The pattern is formed and overlayed to a previous circuit layer as many as 30 times in the manufacture of logic and memory devices. With the ... Read more
Semiconductor lithography is one of the key steps in the manufacturing of integrated silicon-based circuits. In fabricating a semiconductor device such as a transistor, a series of hot processes consisting of vacuum film deposition, oxidations, and dopant implantation are all patterned into microscopic circuits by the wet processes of lithography. Lithography, as adopted by the semiconductor industry, is the process of drawing or printing the pattern of an integrated circuit in a resist material. The pattern is formed and overlayed to a previous circuit layer as many as 30 times in the manufacture of logic and memory devices. With the ... Read more
Product Details
Format
Paperback
Publication date
2012
Publisher
Springer-Verlag New York Inc. United States
Number of pages
952
Condition
New
Series
Microdevices
Number of Pages
952
Place of Publication
New York, NY, United States
ISBN
9781461282280
SKU
V9781461282280
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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