Semiconductor Process Reliability in Practice
Zhenghao Gan
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Description for Semiconductor Process Reliability in Practice
Hardback. Filled with practical examples, this is a comprehensive reference on process reliability for semiconductor process and design engineers. Num Pages: 624 pages, Illustrations. BIC Classification: THR. Category: (G) General (US: Trade). Dimension: 234 x 158 x 38. Weight in Grams: 986.
Publisher's Note: Products purchased from Third Party sellers are not guaranteed by the publisher for quality, authenticity, or access to any online entitlements included with the product.
Proven processes for ensuring semiconductor device reliability
Publisher's Note: Products purchased from Third Party sellers are not guaranteed by the publisher for quality, authenticity, or access to any online entitlements included with the product.
Proven processes for ensuring semiconductor device reliability
Co-written by experts in the field, Semiconductor Process Reliability in Practice contains detailed descriptions and analyses of reliability and qualification for semiconductor device manufacturing and discusses the underlying physics and theory. The book covers initial specification definition, test structure design, analysis of test structure data, and final qualification of the process. Real-world examples of test structure designs to qualify front-end-of-line devices and back-end-of-line interconnects are provided in this ... Read more
Coverage includes:
- Basic device physics
- Process flow for MOS manufacturing
- Measurements useful for device reliability characterization
- Hot carrier injection
- Gate-oxide integrity (GOI) and time-dependentdielectric breakdown (TDDB)
- Negative bias temperature instability
- Plasma-induced damage
- Electrostatic discharge protection of integrated circuits
- Electromigration
- Stress migration
- Intermetal dielectric breakdown
Product Details
Format
Hardback
Publication date
2012
Publisher
McGraw-Hill Education - Europe United States
Number of pages
624
Condition
New
Number of Pages
624
Place of Publication
, United States
ISBN
9780071754279
SKU
V9780071754279
Shipping Time
Usually ships in 4 to 8 working days
Ref
99-2
About Zhenghao Gan
Zhenghao Gan is a reliability technical manager at the Semiconductor Manufacturing International Corporation (SMIC), Shanghai, China. He has extensive technical and management experience in research and development of semiconductor reliability improvement, testing/characterization, problem solving, project management, modeling, and analysis. Waisum Wong, Ph.D., is in charge of process reliability at the Semiconductor Manufacturing International Corporation (SMIC), Shanghai, China. ... Read more
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