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CMOS Cantilever Sensor Systems
Lange, Dirk; Brand, Oliver; Baltes, Henry
€ 130.62
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Description for CMOS Cantilever Sensor Systems
Hardback. This is an introduction to the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers allow the sensitive detection of physical quantities such as forces and mass changes. Series: Microtechnology and MEMS. Num Pages: 142 pages, biography. BIC Classification: PHV; TBN. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly. Dimension: 243 x 166 x 14. Weight in Grams: 364.
This book is intended for scientists and engineers in the field of micro- and nano electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype. It is also a useful resource for researchers on cantilever sensors and resonant sensors in general The reader will become familiar with the potential of the combination of two technological approaches: IC fabrication technology, notably CMOS technology, and silicon micromachining and the resulting microstructures such as cantilever beams. It was recognized early that these two technologies should be merged in ... Read more
This book is intended for scientists and engineers in the field of micro- and nano electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype. It is also a useful resource for researchers on cantilever sensors and resonant sensors in general The reader will become familiar with the potential of the combination of two technological approaches: IC fabrication technology, notably CMOS technology, and silicon micromachining and the resulting microstructures such as cantilever beams. It was recognized early that these two technologies should be merged in ... Read more
Product Details
Format
Hardback
Publication date
2002
Publisher
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG Germany
Number of pages
142
Condition
New
Series
Microtechnology and MEMS
Number of Pages
142
Place of Publication
Berlin, Germany
ISBN
9783540431435
SKU
V9783540431435
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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