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Fabrication Engineering at the Micro and Nanoscale
Stephen A. Campbell
€ 291.17
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Description for Fabrication Engineering at the Micro and Nanoscale
Paperback. Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices. Series: The Oxford Series in Electrical and Computer Engineering. Num Pages: 688 pages, black & white illustrations, black & white tables, figures. BIC Classification: TBC. Category: (G) General (US: Trade). Dimension: 236 x 192 x 26. Weight in Grams: 1221.
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices. With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices. With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.
Product Details
Format
Paperback
Publication date
2012
Publisher
Oxford University Press Inc United States
Number of pages
688
Condition
New
Series
The Oxford Series in Electrical and Computer Engineering
Number of Pages
688
Place of Publication
New York, United States
ISBN
9780199861224
SKU
V9780199861224
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-47
About Stephen A. Campbell
Stephen A. Campbell is the Bordeau Professor of Electrical and Computer Engineering at the University of Minnesota and a fellow of IEEE.
Reviews for Fabrication Engineering at the Micro and Nanoscale
This is one of the best texts in the field. It provides the most complete coverage of fabrication techniques.
Xian-An Cao, West Virginia University
I like Campbell's style and enjoy reading the text. The material is appropriate for the intended audience and there are good summaries of background material.
Trevor Thornton, Arizona State University
... Read more
Xian-An Cao, West Virginia University
I like Campbell's style and enjoy reading the text. The material is appropriate for the intended audience and there are good summaries of background material.
Trevor Thornton, Arizona State University
... Read more