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Nanopositioning Technologies
. Ed(S): Liu, Xinyu; Sun, Yu; Ru, Changhai
€ 131.12
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Description for Nanopositioning Technologies
Hardback. Nanopositioning Technologies Editor(s): Liu, Xinyu; Sun, Yu; Ru, Changhai. Num Pages: 415 pages, 76 black & white illustrations, 203 colour illustrations, biography. BIC Classification: TBN. Category: (P) Professional & Vocational. Dimension: 235 x 155 x 24. Weight in Grams: 783.
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
Product Details
Format
Hardback
Publication date
2015
Publisher
Springer International Publishing AG Switzerland
Number of pages
415
Condition
New
Number of Pages
409
Place of Publication
Cham, Switzerland
ISBN
9783319238524
SKU
V9783319238524
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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