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The Physics Of Microfabrication
Brodie, Ivor; Muray, Julius J.
€ 268.66
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Description for The Physics Of Microfabrication
Hardback. Num Pages: 504 pages, biography. BIC Classification: TJFD; TTB. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly; (UU) Undergraduate. Dimension: 234 x 156 x 30. Weight in Grams: 2010.
The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite ... Read more
The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite ... Read more
Product Details
Format
Hardback
Publication date
1982
Publisher
Springer Science+Business Media United States
Number of pages
504
Condition
New
Number of Pages
504
Place of Publication
, United States
ISBN
9780306408632
SKU
V9780306408632
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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