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The Physics Of Submicron Lithography
Kamil A. Valiev
€ 252.64
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Description for The Physics Of Submicron Lithography
Paperback. Series: Microdevices. Num Pages: 504 pages, biography. BIC Classification: PHF; PHFC; PNFS; THR; TJFD. Category: (P) Professional & Vocational. Dimension: 254 x 178 x 26. Weight in Grams: 957.
This book is devoted to the physics of electron-beam, ion-beam, optical, and x-ray lithography. The need for this book results from the following considerations. The astonishing achievements in microelectronics are in large part connected with successfully applying the relatively new technology of processing (changing the prop erties of) a material into a device whose component dimensions are submicron, called photolithography. In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the ... Read more
This book is devoted to the physics of electron-beam, ion-beam, optical, and x-ray lithography. The need for this book results from the following considerations. The astonishing achievements in microelectronics are in large part connected with successfully applying the relatively new technology of processing (changing the prop erties of) a material into a device whose component dimensions are submicron, called photolithography. In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the ... Read more
Product Details
Format
Paperback
Publication date
2012
Publisher
Springer-Verlag New York Inc. United States
Number of pages
504
Condition
New
Series
Microdevices
Number of Pages
493
Place of Publication
New York, NY, United States
ISBN
9781461364610
SKU
V9781461364610
Shipping Time
Usually ships in 15 to 20 working days
Ref
99-15
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